Active diagnostic interface for wafer probe applications
AssigneeFormFactor, Inc.
InventorsRoy Henson, Matthew Chraft
Life of this patent
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Abstract
A diagnostic interface on a wafer probe card is provided to enable monitoring of test signals provided between the test system controller and one or more DUTs on a wafer during wafer testing. To prevent distortion of test signals on the channel lines, in one embodiment buffers are provided on the probe card as part of the diagnostic interface connecting to the channels. In another embodiment, an interface adapter pod is provided that connects to the diagnostic interface on the probe card to process the test results and provide the results to a user interface such as a personal computer.
Claims19
a test system comprising:
- a probe card configured to provide signals from a test system controller through channels to contacts for connecting to pads of devices under tests (DUTs);
- and
- a diagnostic interface attached to the probe card, the diagnostic interface including electrical connections to at least some of the channels for connecting to at least one of the DUTs.
A test system comprising:
- a test system controller;
- means for electrically contacting devices under test (DUTs);
- channels connecting the test system controller to the means for electrically contacting the DUTs;
- and
- means for connecting to at least a portion of the channels for providing test signals to a user interface.
A method of testing devices under test (DUTs) on a wafer comprising:
- providing a diagnostic interface in a wafer test system;
- and
- monitoring test signals provided between a test system controller and at least one device under test (DUT) using the diagnostic interface.
Dependencies are inferred from the claim text.