Intrument for testing solid-state imaging device
OwnerShingo Tamaiinventor
Life of this patent
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Abstract
A testing apparatus, by which an optical system to irradiate a test light to a solid-state imaging device is easily aligned with the solid-state imaging device and highly efficient tests can be conducted, is provided. It includes an optical module 35 for irradiating a light from a light source to a light receiving surface of the solid-state imaging device through a pin hole, a probe card 20 having contact probes for contacting pads of the solid-state imaging device, and a motor 30 and a holding arm 31 for moving the optical module 35 to a predetermined position corresponding to the solid-state imaging device to be tested through an opening 20h provided to the probe card 20 in a state where the contact probes 21 contact the pads of the solid-state imaging device to be tested.
Claims16
An optical module arranged facing a light receiving surface of a solid-state imaging device and used for irradiating a test light for said light receiving surface at testing photoelectric converting property of said solid-state imaging device, comprising:
- an optical lens;
- a diffusion plate adjusting an intensity distribution of a light passed through said optical lens;
- a pinhole passing said light from said diffusion plate;
- and
- a light blocking portion preventing an outside light from entering into an optical path leading from said lens to said pinhole.
A relay device transmitting necessary signals for a measurement of a photoelectric converting property of a solid-state imaging device by being connected electrically to said solid-state imaging device to be measured at testing said photoelectric converting property of said solid-state imaging device, comprising:
- an optical module arranged facing a light receiving surface of said solid-state imaging device and used for irradiating a test light for said light receiving surface at testing photoelectric converting property of said solid-state imaging device.
A testing apparatus for irradiating a light for a solid-state imaging device and testing a photoelectric converting property of said solid-state imaging device, comprising:
- an optical module outputting an entered light as a test light through a pinhole;
- a relay device transmitting necessary signals for a measurement of said photoelectric converting property of said solid-state imaging device by being connected electrically to said solid-state imaging device;
- and
- a means for moving and determining position moving said optical module at a position capable of outputting said light for said solid-state imaging device at a state that said relay device is connected electrically with said solid-state imaging device.
A testing apparatus for irradiating a light for a solid-state imaging device and testing a photoelectric converting property of said solid-state imaging device, comprising:
- an optical module irradiating a light lead along a predetermined optical path from a light source for said solid-state imaging device through a pinhole;
- a moving table holding said solid-state imaging device capable of moving in a plane being vertical to a light axis of said optical module;
- a means for moving said optical module outside said predetermined optical path;
- a half mirror inserted in said predetermined optical path at a state that said optical module is moved outside said optical path, transmitting said light from said light source proceeding to said solid-state imaging device, and reflecting a image of said solid-state imaging device irradiated by said light;
- a means for imaging said image reflected by said half mirror;
- a means for controlling said moving table so that said optical axis of said optical module is positioned at a predetermined position of said light receiving surface based on a graphic date of said light receiving surface imaged by said means for imaging.
Dependencies are inferred from the claim text.