Light emitting element and method for manufacturing the same

Abstract

A light emitting element including: a semiconductor layer stack including a light emitting layer; a metal optical reflection film which is formed on the surface of the semiconductor layer stack opposite to the surface from which light emitted from the light emitting layer is taken out of the semiconductor layer stack to reflect the emitted light; a metal cover film which is formed above the metal optical reflection film to prevent the metal optical reflection film from coming off; and a metal anti-diffusion film which is formed between the metal optical reflection film and the metal cover film to prevent interdiffusion between the metal optical reflection film and the metal cover film. The metal anti-diffusion film is a single layer film made of any one of tungsten, rhenium and tantalum or a layered film made of two or more of tungsten, rhenium and tantalum.

Dependencies are inferred from the claim text.