Piezoelectric element and method for manufacturing the same, ink jet recording head and ink jet printer
AssigneeSeiko Epson Corporation
InventorsSetsuya Iwashita, Koji Ohashi, Takamitsu Higuchi
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Abstract
A method for manufacturing a piezoelectric element includes the steps of forming a first electrode above a substrate, forming, above the first electrode, a piezoelectric layer composed of a piezoelectric material having a perovskite structure, and forming a second electrode above the piezoelectric layer, wherein the step of forming the first electrode includes forming a layer containing nickel, and forming, above the layer containing nickel, a lanthanum nickelate layer that is oriented to a cubic (100).
Claims16
A method for manufacturing a piezoelectric element, comprising the steps of:
- forming a first electrode above a substrate;
- forming, above the first electrode, a piezoelectric layer composed of a piezoelectric material having a perovskite structure;
- and
- forming a second electrode above the piezoelectric layer,
- wherein the step of forming the first electrode includes forming a layer containing nickel, and forming, above the layer containing nickel, a lanthanum nickelate layer that is oriented to a cubic (100).
A piezoelectric element comprising:
- a substrate;
- a first electrode formed above the substrate;
- a piezoelectric layer that is formed above the first electrode and has a perovskite structure;
- and
- a second electrode formed above the piezoelectric layer,
- wherein the first electrode includes a layer containing nickel, and a lanthanum nickelate layer that is formed above the layer containing nickel and is oriented to a cubic (100).
Dependencies are inferred from the claim text.