Piezoelectric actuator and discharging device
AssigneeKYOCERA Corporation
InventorYoshihiro Yuu
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Abstract
A piezoelectric actuator is formed of a ceramic diaphragm made of a first piezoelectric ceramic and a number of displacement elements which are provided on the surface of the ceramic diaphragm, wherein each displacement element is formed of a piezoelectric layer made of a second piezoelectric ceramic as well as a common electrode and a drive electrode which sandwich this piezoelectric layer, and the above described first piezoelectric ceramic and the above described second piezoelectric ceramic have substantially the same main components and different piezoelectric properties, and thereby, a piezoelectric actuator can have excellent durability when driven.
Claims8
A piezoelectric actuator, comprising:
- a ceramic diaphragm made of a first piezoelectric ceramic;
- and a number of displacement elements which are provided on a surface of the ceramic diaphragm, each displacement element being formed of a piezoelectric layer made of a second piezoelectric ceramic as well as a common electrode and a drive electrode which sandwich this piezoelectric layer, wherein
- said first piezoelectric ceramic and said second piezoelectric ceramic have substantially the same main components and different piezoelectric properties.
Dependencies are inferred from the claim text.