Alignment stage apparatus
AssigneeCanon Kabushiki Kaisha
InventorShinji Ohishi
Life of this patent
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Abstract
An alignment stage apparatus includes a base structure and a movable stage which can move along a surface of the base structure so as not to be in contact with the base structure. The apparatus includes a plurality of power transmission coils buried under the surface of the base structure, a power reception coil attached to the movable stage to oppose the surface, a switching device for sequentially switching, of the plurality of power transmission coils, those that are to be energized to feed power in accordance with a position of the movable stage, and a power feeding device for supplying AC power to the power transmission coils to be energized through the switching device.
Claims11
An alignment stage apparatus including a base structure and a movable stage which can move along a surface of said base structure so as not to be in contact with said base structure, said apparatus comprising:
- a plurality of power transmission coils buried under the surface of said base structure;
- a power reception coil attached to said movable stage to oppose the surface;
- switching means for sequentially switching, of said plurality of power transmission coils, those that are to be energized to feed power in accordance with a position of said movable stage;
- and
- power feeding means for supplying AC power to said power transmission coils to be energized through said switching means.
Dependencies are inferred from the claim text.