Semiconductor device and manufacturing method thereof
AssigneeOki Semiconductor Co., Ltd.
InventorYoshihiro Saeki
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Abstract
The present invention provides a semiconductor device comprising a lower substrate having at least one wiring pattern formed of a plurality of wirings, a semiconductor chip positioned above the lower substrate and electrically connected to the wirings, an intermediate member which seals the semiconductor chip in columnar form and substantially, and an upper plate which substantially covers a whole upper surface of the intermediate member. A thermal expansion coefficient of the upper plate and a thermal expansion coefficient of the lower substrate are set substantially identical.
Claims16
A semiconductor device comprising:
- a lower substrate having at least one wiring pattern formed of a plurality of wirings;
- a semiconductor chip positioned above the lower substrate and electrically connected to the wirings;
- an intermediate member which seals the semiconductor chip in columnar form and substantially;
- and
- an upper plate which substantially covers a whole upper surface of the intermediate member,
- wherein a thermal expansion coefficient of the upper plate is substantially identical to that of the lower substrate.
Dependencies are inferred from the claim text.