Bevel dicing semiconductor components
OwnerLarry Jordaninventor
Life of this patent
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Abstract
A semiconductor component is disclosed. The semiconductor component includes a silicon cap that is step-sawn with a dice saw to include at least one horizontal step and at least one vertical step for shaping a structure on one or more sides of the silicon cap. A semiconductor device is also disclosed. The semiconductor device includes a silicon cap wafer, a bonding media, a sensor wafer, and a bond pad placed over the sensor wafer. The silicon cap wafer includes the at least one horizontal step and the at least one vertical step formed by the dice saw to define a bond pad opening. A method for shaping the semiconductor component with the at least one horizontal step and the at least one vertical step is also disclosed.
Claims13
A semiconductor component comprising:
- a silicon cap having a step shaped surface, wherein said step shaped surface includes at least one horizontal step and at least one vertical step for shaping a surface on one or more sides of the silicon cap.
A semiconductor device, comprising:
- a silicon cap wafer, a bonding media, a sensor wafer, and a bond pad placed over the sensor wafer, wherein the silicon cap wafer includes at least one horizontal step and at least one vertical step formed by a dice saw to define a bond pad opening.
A method for shaping a semiconductor component, comprising the steps of:
- step sawing a silicon cap with a dice saw to form at least one horizontal step and at least one vertical step on one or more sides of the silicon cap.
Dependencies are inferred from the claim text.