Capacitor with carbon nanotubes

A capacitor, comprising:

• a substrate defining a first electrical terminal;
• a catalyst layer disposed on the substrate;
• a plurality of carbon nanotubes disposed on the catalyst layer and electrically coupled through the catalyst layer to the substrate;
• a dielectric layer disposed over the plurality of carbon nanotubes;
• and
• a conductive layer disposed on the dielectric layer and defining a second electrical terminal.

A capacitor, comprising:

• a substrate defining a first electrical terminal;
• a catalyst layer disposed on the substrate;
• a plurality of carbon nanotubes disposed on the catalyst layer;
• a dielectric layer disposed over the plurality of carbon nanotubes;
• a conductive layer disposed on the dielectric layer and defining a second electrical terminal;
• a plurality of power contacts electrically coupled by a plurality of first vias to a selected one of the catalyst layer and the conductive layer;
• and a plurality of ground contacts electrically coupled by a plurality of second vias to the other one of the catalyst layer and the conductive layer.