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US 2006/0214210 A1Published application
Semiconductor device
OwnerHiroshi Itokawa, Keitaro Imai +2inventors
InventorsHiroshi Itokawa, Keitaro Imai, Koji Yamakawa, Bum-ki Moon
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Abstract
A semiconductor device according to an aspect of the invention comprises a semiconductor substrate, a conductive plug which is connected to an active region of a transistor formed on the semiconductor substrate, a metal silicide film which covers a bottom surface portion and side surface portion of the conductive plug, and an electrode structure which is formed on the conductive plug.
Claims11
A semiconductor device comprising:
- a semiconductor substrate;
- a conductive plug which is connected to an active region of a transistor formed on the semiconductor substrate;
- a metal silicide film which covers a bottom surface portion and side surface portion of the conductive plug;
- and
- an electrode structure which is formed on the conductive plug.
2 more elements
Dependencies are inferred from the claim text.