Formation of micro lens by using flowable oxide deposition
OwnerJin Li, Li Liinventors
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Abstract
A method of forming a microlens employing relatively few processing steps and with a controlled microlens radii using a processes including a flowable oxide is disclosed. A lens form having recesses therein is produced and a flowable oxide material is deposited in recesses. Surface tension of the flowable oxide material within the form recesses creates spherical dips within the oxide material. The flowable oxide is then converted into silicon oxide by a heat process. A microlens material is deposited over the silicon oxide having spherical dips, and planarized to form a focus microlens array.
Claims17
1-10. (canceled)
A method of forming a microlens, said method comprising:
- forming a light transmissive layer comprising a solidified flowable oxide having a planar bottom surface and a planar top surface;
- forming a recess in said light transmissive layer;
- depositing a flowable oxide material in a bottom and on a sidewall of said cylindrical recess;
- transforming said flowable oxide into a light transmissive solid silicon oxide material;
- and
- depositing a lens material over said light transmissive solid silicon oxide material and said light transmissive layer.
A method of forming a pixel cell of an imaging device, said method comprising:
- providing a pixel circuit in a semiconductor wafer, said pixel circuit having a photosensor;
- providing a light-transmissive form having a recess over said photosensor;
- forming a flowable oxide within said recess of said first light transmissive form;
- solidifying said flowable oxide;
- and
- forming a lens layer over said first transmissive form and said flowable oxide.
Dependencies are inferred from the claim text.