Display device and manufacturing method thereof
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsKengo Akimoto, Noriko Miyagi, Shingo Eguchi
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Abstract
It is an object of the present invention to provide a display device that has a structure of an electrode where a residue of a transparent conductive film is not generated when a weak acid solution is used in etching, which is particularly appropriate for an electrode of a light-emitting element. A display device according to the present invention has an electrode that has a laminated structure of laminated transparent conductive films, and the electrode has a first transparent conductive film as the bottom layer, where no residue is generated when a weak acid solution is used in etching, and a second transparent conductive film as the top layer, which has a work function of 5.0 eV or more.
Claims48
A method of manufacturing a display device, comprising:
- forming a first transparent conductive film comprising one selected from the group consisting of indium tin oxide containing one or both of silicon oxide and silicon, zinc oxide and zinc oxide containing gallium;
- forming a second transparent conductive film comprising one selected from the group consisting of indium tin oxide and tin oxide over the first transparent conductive film;
- and
- patterning the first transparent conductive film and the second transparent conductive film by using a weak acid solution.
A method of manufacturing a display device, comprising:
- forming a first transparent conductive film comprising one selected from the group consisting of indium tin oxide containing one or both of silicon oxide and silicon, zinc oxide and zinc oxide containing gallium;
- forming a second transparent conductive film comprising one selected from the group consisting of indium tin oxide and tin oxide over the first transparent conductive film;
- patterning the first transparent conductive film and the second transparent conductive film by using a weak acid solution;
- and
- performing heat treatment to crystallize the second transparent conductive film.
A method of manufacturing a display device, comprising:
- forming a first transparent conductive film comprising one selected from the group consisting of indium tin oxide containing one or both of silicon oxide and silicon, zinc oxide and zinc oxide containing gallium;
- forming a second transparent conductive film comprising one selected from the group consisting of indium tin oxide and tin oxide over the first transparent conductive film;
- patterning the first transparent conductive film and the second transparent conductive film by using a weak acid solution;
- performing heat treatment to crystallize the second transparent conductive film;
- and
- subjecting the second transparent conductive film to surface treatment.
A method of manufacturing a display device, comprising:
- forming a first transparent conductive film;
- and
- forming a second transparent conductive film over the first transparent conductive film,
- wherein crystallinity of the second transparent conductive film is higher than that of the first transparent conductive film.
A method of manufacturing a display device, comprising:
- forming a first transparent conductive film;
- forming a second transparent conductive film over the first transparent conductive film;
- and
- performing heat treatment to crystallize the second transparent conductive film
- wherein crystallinity of the second transparent conductive film is higher than that of the first transparent conductive film.
A method of manufacturing a display device, comprising:
- forming a first transparent conductive film;
- forming a second transparent conductive film over the first transparent conductive film;
- performing heat treatment to crystallize the second transparent conductive film;
- and
- subjecting the second transparent conductive film to surface treatment,
- wherein crystallinity of the second transparent conductive film is higher than that of the first transparent conductive film.
Dependencies are inferred from the claim text.