Methods for producing a dielectric, dielectric having self-generating pores, monomer for porous dielectrics, process for preparing poly-o-hydroxyamides, process for preparing ploybenzoxazoles, and processes for producing an electronic component

A monomer for the preparation of a poly-o-hydroxyamide usable in dielectrics, comprising a backbone having a formula selected from the group consisting of Formula IVa and IV

• where
• R1, R2, R3, and R4, in each case independently, are selected from the group of substituents selected from the group consisting of H, —C6H5, —(CH2)n—CH3, -G-(CH2)n—CH3, —CH((CH2)nCH3)2, —CH(CH3)2, -G-CH(CH3)2, —C(CH3)3, -G-C(CH3)3, —(CF2)n—CF3, -G-(CF2)n—CF3, —CF((CF2)nCF3)2, —CF(CF3)2, —C(CF3)3, —N(CH3)2, —N(CF3)2,
• R5, in each case independently, is a substituent selected from the group consisting of H, —CO(CH2)n—CH3, —COO—(CH2)n—CH3, —(CH2)n—CH3, —CH((CH2)nCH3)2, —CH(CH3)2, —C(CH3)3, —(CF2)n—CF3, —CF((CF2)nCF3)2, —CF(CF3)2, —C(CF3)3, —(CH2)n—C6H5, —COO—(CH2)n—C6H5;
• and
• G is a heteroatom selected from the group consisting of oxygen and sulfur.

A process for preparing polybenzoxazoles having a Formula III

• where
• Z1 has a formula selected from the group consisting of
• E1 and E2, in each case independently, are substituents selected from the group consisting of hydrogen, a hydroxyl group, a saturated monovalent hydrocarbon, and an unsaturated monovalent hydrocarbon;
• Y1 and Y2, in each case independently for each position, are a divalent hydrocarbon;
• Z2, in each case independently for each position, is a tetravalent hydrocarbon composed of groups linked to one another and selected from the group consisting of alkyl and aryl groups;
• R1, R2, R3, and R4, in each case independently, are substituents selected from the group consisting of H, —C6H5, —(CH2)n—CH3, -G-(CH2)n—CH3, —CH((CH2)nCH3)2, —CH (CH3)2, -G-CH(CH3)2, —C(CH3)3, -G-C(CH3)3, —(CF2)n—CF3, -G-(CF2)n—CF3, —CF((CF2)nCF3)2, —CF(CF3)2, —C(CF3)3, —N(CH3)2, —N(CF3)2,
• R5, in each case independently, is a substituent selected from the group consisting of H, —CO(CH2)n—CH3, —COO—(CH2)n—CH3, —(CH2)n—CH3, —CH((CH2)nCH3)2, —CH(CH3)2, —C(CH3)3, —(CF2)n—CF3, —CF((CF2)nCF3)2, —CF(CF3)2, —C(CF3)3, —(CH2)n—C6H5, —COO—(CH2)n—C6H5;
• G is a heteroatom selected from the group consisting of oxygen and sulfur;
• a is an integer from 0 to 1;
• b has a value from 1 to 200;
• c has a value from 0 to 200;
• and
• d is an integer from 0 to 1;
• the method which comprises:
• heating poly-o-hydroxyamides having a Formula I
• where
• E1 and E2, in each case independently, are substituents selected from the group consisting of hydrogen, a hydroxyl group, a saturated monovalent hydrocarbon, and an unsaturated monovalent hydrocarbon;
• Y1 and Y2, in each case independently for each position, are a divalent hydrocarbon;
• Z1, in each case independently for each position, is a structural unit having a formula selected from the group consisting of Formula IIa and IIb
• in which the bond (-*) and the substituent -GR5 are disposed in the ortho position relative to one another,
• Z2, in each case independently for each position, is a tetravalent hydrocarbon composed of groups linked to one another and selected from the group consisting of alkyl and aryl groups;
• R1, R2, R3, and R4, in each case independently, are substituents selected from the group consisting of H, —C6H5, —(CH2)n—CH3, -G-(CH2)n—CH3, —CH((CH2)nCH3)2, —CH(CH3)2, -G-CH(CH3)2, —C(CH3)3, -G-C(CH3)3, —(CF2)n—CF3, -G-(CF2)n—CF3, —CF((CF2)nCF3)2, —CF(CF3)2, —C(CF3)3, —N(CH3)2, —N(CF3)2,
• R5, in each case independently, is a substituent selected from the group consisting of H, —CO (CH2)n—CH3, —COO—(CH2)n—CH3, —(CH2)n—CH3, —CH((CH2)nCH3)2, —CH(CH3)2, —C(CH3)3, —(CF2)n—CF3, —CF((CF2)nCF3)2, —CF(CF3)2, —C(CF3)3, —(CH2)n—C6H5, —COO—(CH2)n—C6H5;
• G is a heteroatom selected from the group consisting of oxygen and sulfur;
• a is an integer from 0 to 1;
• b has a value from 1 to 200;
• c has a value from 0 to 200;
• d is an integer from 0 to 1;
• n is an integer from 0 to 5;
• R6 is a divalent substituent selected from the group consisting of:
• R7 is a substituent selected from the group consisting of an alkyl group having from 1 to 10 carbon atoms and an aryl group having from 5 to 22 carbon atoms;
• and p1 e is an integer from 1 to 10.

A process for producing an electronic component, which comprises:

• preparing a solution of a poly-o-hydroxyamide having a Formula I in a solvent
• where
• E1 and E2, in each case independently, are substituents selected from the group consisting of hydrogen, a hydroxyl group, a saturated monovalent hydrocarbon, and an unsaturated monovalent hydrocarbon;
• Y1 and Y2, in each case independently for each position, are a divalent hydrocarbon;
• Z1, in each case independently for each position, is a structural unit having a formula selected from the group consisting of Formula IIa and IIb
• in which the bond (-*) and the substituent -GR5 are disposed in the ortho position relative to one another,
• Z2, in each case independently for each position, is a tetravalent hydrocarbon composed of groups linked to one another and selected from the group consisting of alkyl and aryl groups;
• R1, R2, R3, and R4, in each case independently, are substituents selected from the group consisting of H, —C6H5, —(CH2)n—CH3, -G-(CH2)n—CH3, —CH((CH2)nCH3)2, —CH(CH3)2, -G-CH(CH3)2, —C(CH3)3, -G-C(CH3)3, —(CF2)n—CF3, -G-(CF2)n—CF3, —CF((CF2)nCF3)2, —CF(CF3)2, —C(CF3)3, —N(CH3)2, —N(CF3)2,
• R5, in each case independently, is a substituent selected from the group consisting of H, —CO(CH2)n—CH3, —COO—(CH2)n—CH3, —(CH2)n—CH3, —CH((CH2)nCH3)2, —CH(CH3)2, —C(CH3)3, —(CF2)n—CF3, —CF((CF2)nCF3)2, —CF(CF3)2, —C(CF3)3, —(CH2)n—C6H5, —COO—(CH2)n—C6H5;
• G is a heteroatom selected from the group consisting of oxygen and sulfur;
• a is an integer from 0 to 1;
• b has a value from 1 to 200;
• c has a value from 0 to 200;
• d is an integer from 0 to 1;
• n is an integer from 0 to 5;
• R6 is a divalent substituent selected from the group consisting of:
• R7 is a substituent selected from the group consisting of an alkyl group having from 1 to 10 carbon atoms and an aryl group having from 5 to 22 carbon atoms;
• and
• e is an integer from 1 to 10;
• applying the solution to a substrate;
• evaporating the solvent to obtain a film;
• heating the film to cyclize the poly-o-hydroxyamide having the Formula I to yield a polybenzoxazole having a Formula III
• where
• Z1 has a formula selected from the group consisting of
• E1 and E2, in each case independently, are substituents selected from the group consisting of hydrogen, a hydroxyl group, a saturated monovalent hydrocarbon, and an unsaturated monovalent hydrocarbon;
• Y1 and Y2, in each case independently for each position, are a divalent hydrocarbon;
• Z2, in each case independently for each position, is a tetravalent hydrocarbon composed of groups linked to one another and selected from the group consisting of alkyl and aryl groups;
• R1, R2, R3, and R4, in each case independently, are substituents selected from the group consisting of H, —C6H5, —(CH2)n—CH3, -G-(CH2)n—CH3, —CH((CH2)nCH3)2, —CH(CH3)2, -G-CH(CH3)2, —C(CH3)3, -G-C(CH3)3, —(CF2)n—CF3, -G-(CF2)n—CF3, —CF((CF2)nCF3)2, —CF(CF3)2, —C(CF3)3, —N(CH3)2, —N(CF3)2,
• R5, in each case independently, is a substituent selected from the group consisting of H, —CO (CH2)n—CH3, —COO—(CH2)n—CH3, —(CH2)n—CH3, —CH((CH2)nCH3)2, —CH(CH3)2, —C(CH3)3, —(CF2)n—CF3, —CF((CF2)nCF3)2, —CF(CF3)2, —C(CF3)3, —(CH2)n—C6H5, —COO—(CH2)n—C6H5;
• G is a heteroatom selected from the group consisting of oxygen and sulfur;
• a is an integer from 0 to 1;
• b has a value from 1 to 200;
• c has a value from 0 to 200;
• and
• d is an integer from 0 to 1;
• structuring the film to obtain a resist structure having trenches;
• depositing a conductive material on the resist structure so that the trenches are filled with a conductive material;
• and
• removing excess of the conductive material.

A process for producing an electronic component, which comprises:

• preparing a solution of a poly-o-hydroxyamide in a solvent, the poly-o-hyroxyamide having a Formula I
• where
• E1 and E2, in each case independently, are substituents selected from the group consisting of hydrogen, a hydroxyl group, a saturated monovalent hydrocarbon, and an unsaturated monovalent hydrocarbon;
• Y1 and Y2, in each case independently for each position, are a divalent hydrocarbon;
• Z1, in each case independently for each position, is a structural unit having a formula selected from the group consisting of Formula IIa and IIb
• in which the bond (-*) and the substituent -GR5 are disposed in the ortho position relative to one another,
• Z2, in each case independently for each position, is a tetravalent hydrocarbon composed of groups linked to one another and selected from the group consisting of alkyl and aryl groups;
• R1, R2, R3, and R4, in each case independently, are substituents selected from the group consisting of H, —C6H5, —(CH2)n—CH3, -G-(CH2)n—CH3, —CH((CH2)nCH3)2, —CH (CH3)2, -G-CH(CH3)2, —C(CH3)3, -G-C(CH3)3, —(CF2)n—CF3, -G-(CF2)n—CF3, —CF((CF2)nCF3)2, —CF(CF3)2, —C(CF3)3, —N(CH3)2, —N(CF3)2,
• R5, in each case independently, is a substituent selected from the group consisting of H, —CO(CH2)n—CH3, —COO—(CH2)n—CH3, —(CH2)n—CH3, —CH((CH2)nCH3)2, —CH(CH3)3)2, —C(CH3)3, —(CF2)n—CF3, —CF((CF2)nCF3)2, —CF(CF3)2, —C(CF3)3, —(CH2)n—C6H5, —COO—(CH2)n—C6H5;
• G is a heteroatom selected from the group consisting of oxygen and sulfur;
• a is an integer from 0 to 1;
• b has a value from 1 to 200;
• c has a value from 0 to 200;
• d is an integer from 0 to 1;
• n is an integer from 0 to 5;
• R6 is a divalent substituent selected from the group consisting of:
• R7 is a substituent selected from the group consisting of an alkyl group having from 1 to 10 carbon atoms and an aryl group having from 5 to 22 carbon atoms;
• and
• e is an integer from 1 to 10;
• applying the solution to a substrate having a surface with metallic structures and trenches formed between the metallic structures;
• evaporating the solvent to fill the trenches with the poly-o-hydroxyamide of the Formula I;
• and
• heating the substrate to cyclize the poly-o-hydroxyamide of the formula I to yield the polybenzoxazole having a Formula III.