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US 2006/0213900 A1Published application
Electrostatic chuck and method of manufacturing electrostatic chuck
AssigneeNGK Insulators, Ltd.
InventorsHiroto Matsuda, Kazuhiro Nobori, Yasuyoshi Imai, Tetsuya Kawajiri
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Abstract
An electrostatic chuck includes, a base plate made of ceramic, an electrode for generating an electrostatic clamping force, and a dielectric material layer formed on the electrode and made of ceramic having a volume resistivity of not less than 1×1015 Ω·cm at 100° C. and the same main constituent as the base plate. The base plate has a higher thermal conductivity than the dielectric material layer.
Claims11
An electrostatic chuck, comprising:
- a base plate made of ceramic;
- an electrode for generating an electrostatic clamping force;
- and
- a dielectric material layer formed on the electrode, and made of ceramic having a volume resistivity of not less than 1×1015 Ω·cm at 100° C. and the same main constituent as the base plate,
- wherein the base plate has a higher thermal conductivity than the dielectric material layer.
2 more elements
A method of manufacturing an electrostatic chuck, comprising:
- forming a base plate made of ceramic;
- forming an electrode for generating an electrostatic clamping force;
- and
- forming on the electrode a dielectric material layer made of ceramic having a volume resistivity of not less than 1×1015 Ω·cm at 100° C. and the same main constituent to the foregoing ceramic,
- wherein the base plate has a higher thermal conductivity than the dielectric material layer.
2 more elements
Dependencies are inferred from the claim text.