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US 2006/0213885 A1Published application
Micro-machining employing multiple independently focused and independently steered beams
AssigneeOrbotech Ltd.
InventorsAbraham GROSS, Zvi KOTLER, Eliezer LIPMAN, Dan ALON
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Abstract
A system for delivering energy to a substrate includes a laser energy source providing at least two laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.
Claims16
Apparatus for delivering laser energy to a workpiece, comprising:
- at least one laser energy source providing at least two laser beams;
- a plurality of laser beam steering modules arranged to selectably steer said at least two laser beams to selectable locations on a target;
- and
- a plurality of laser beam focusing optical modules associated with said laser beam steering modules for focusing at least one of said at least two laser beams onto said workpiece.
1 more element
Dependencies are inferred from the claim text.