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AssigneeSukegawa Electric Co., Ltd.
InventorShigetaka Haga
Estimating the term…
An electron bombardment heating apparatus, in which thermions emitted from filaments 9 are accelerated and impinged upon a heating plate 2, so as to heat the heating plate 2, wherein a periphery wall of a heated material supporting member 1 having a heating plate as a ceiling thereof is made up with multi-staged periphery wall portions 13a and 13b, being piled up vertically and different in the radius thereof, and those periphery wall portions 13a and 13b are connected with each other by means of a ring-like horizontal wall 5. With this, thermal stress can be mitigated, which is caused due to the difference of temperature between the lower end portion of the heated material supporting member 1 and the heating plate 2 when heating up the heating plate 2, thereby bringing about no breakage in the heated material supporting member if conducting heating and cooling upon the heating plate, repetitively.
-4. (canceled)
A temperature controlling apparatus for an electron bombardment heating apparatus, for controlling temperature due to heat generation of a heating plate in the electron bombardment heating apparatus, in which the heating plate is heated through impingement of accelerated thermions emitted from a filament thereupon, comprising:
A method for controlling temperature due to heat generation of a heating plate for use in an electron bombardment type heating apparatus, in which the heating plate is heated through impingement of accelerated thermions emitted from a filament thereupon, including therein an electric power adjuster for controlling filament electric power to be supplied to the filament, comprising the following steps of:
Dependencies are inferred from the claim text.