Temperature control method and apparatus, and plasma processing apparatus

A temperature control apparatus of an electrode, to which a high frequency power for generating a plasma in a plasma processing apparatus is applied, comprising:

• a circulation channel for circulating a heat transfer medium through an inside of the electrode and provided with;
• a first heat exchanger for performing a heat exchange of the heat transfer medium passed through the electrode by a sensible heat of a liquid coolant;
• a second heat exchanger for performing a heat exchange of the heat transfer medium passed through the first heat exchanger by a latent heat of a coolant;
• a heater for heating the heat transfer medium supplied to the inside of the electrode;
• and
• a control unit, during an idle state in which a substrate processing is not performed, for controlling a temperature of the heat transfer medium in the circulation channel by the second heat exchanger and the heater to control a temperature of the electrode to be maintained at a predetermined set temperature, and when the high frequency power is applied to the electrode to start the substrate processing, for reducing the temperature of the heat transfer medium below the set temperature of the electrode through the use of the first heat exchanger and the second heat exchanger to maintain the temperature of the electrode at the set temperature.

A plasma processing apparatus comprising:

• an electrode, to which a high frequency power for generating a plasma is applied;
• a circulation channel for circulating a heat transfer medium through an inside of the electrode and provided with;
• a first heat exchanger for performing a heat exchange of the heat transfer medium passed through the electrode by a sensible heat of a liquid coolant;
• a second heat exchanger for performing a heat exchange of the heat transfer medium passed through the first heat exchanger by a latent heat of a coolant;
• a heater for heating the heat transfer medium supplied to the inside of the electrode;
• and
• a control unit, during an idle state in which a substrate processing is not performed, for controlling a temperature of the heat transfer medium in the circulation channel by the second heat exchanger and the heater to control a temperature of the electrode to be maintained at a predetermined set temperature, and when the high frequency power is applied to the electrode to start the substrate processing, for reducing the temperature of the heat transfer medium below the set temperature of the electrode through the use of the first heat exchanger and the second heat exchanger to maintain the temperature of the electrode at the set temperature.