Method of producing ceramic green sheet and method of producing electronic component using this ceramic green sheet
AssigneeTDK Corporation
InventorsMasayuki Yoshida, Junichi Suto, Shunji Aoki, Genichi Watanabe
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Abstract
An object of the invention is to provide a flat ceramic sheet including an internal electrode used for manufacturing a multilayer ceramic electronic part. Specifically, an electrode portion is formed on a surface of a transparent base member, and a photosensitive slurry containing dielectric powder is applied thereon. The photosensitive slurry is exposed from the backside of the base member up to a predetermined thickness, and then it is subjected to development. After that, the base member is removed. Thus, a ceramic green sheet is obtained.
Claims21
A method of producing a ceramic green sheet utilizing an exposure process and a development process, comprising the steps of:
- attaching a photosensitive material containing a powder that has a specific electric characteristic on a surface of a base member that can transmit light used in said exposure process, said photosensitive material having sensitivity to said light;
- irradiating said photosensitive material with said light from the backside of said base member to perform said exposure process with such an exposure dose that said photosensitive material is exposed up to a predetermined thickness from said base member;
- and
- performing said development process on said photosensitive material after said exposure process.
A method of producing a ceramic green sheet utilizing an exposure process and a development process, comprising the steps of:
- attaching a first photosensitive material containing a powder that has a specific electric characteristic on a surface of a base member that can transmit light used in said exposure process, said first photosensitive material having sensitivity to said light;
- irradiating said first photosensitive material with said light from the backside of said base member to perform said exposure process with such an exposure dose that said first photosensitive material is exposed up to a first predetermined thickness from said base member;
- performing said development process on said first photosensitive material after said exposure process,
- forming a light blocking portion composed of a member that does not transmit the light used in said exposure process on a surface of said first photosensitive material after said development process;
- attaching a second photosensitive material containing a powder that has a specific electric characteristic on a surface of said light blocking portion and said first photosensitive material after said development process, said second photosensitive material having sensitivity to said light;
- irradiating said second photosensitive material with said light from the backside of said base member to perform said exposure process with such an exposure dose that said second photosensitive material is exposed up to a second predetermined thickness from the surface of said first photosensitive material;
- and
- performing said development process on said second photosensitive material after said exposure process.
A method of producing a ceramic green sheet utilizing an exposure process and a development process, comprising the steps of:
- forming a light blocking member with a predetermined thickness that does not transmit light used in said exposure process on a front side surface of a member having a portion that can transmit light used in said exposure process, said front side surface being a surface on which a sheet is to be formed;
- attaching a photosensitive material containing a powder that has a specific electric characteristic on the surface of said member and the surface of said light blocking member, said photosensitive material having sensitivity to the light used in said exposure process;
- irradiating said photosensitive material with said light from the backside of said member to perform said exposure process with such an exposure dose that said photosensitive material is exposed up to a predetermined thickness from said member;
- and
- performing said development process on said photosensitive material after said exposure process.
A method of producing a ceramic green sheet utilizing an exposure process and a development process, comprising the steps of:
- forming a predetermined pattern of a material that does not transmit light used in said exposure process on a base member that can transmit light;
- attaching a photosensitive material containing a powder that has a specific electric characteristic on said base member and said material, said photosensitive material having sensitivity to said light;
- irradiating said photosensitive material with said light from the backside of said base member to perform said exposure process with such an exposure dose that said photosensitive material is exposed up to a predetermined thickness from said base member;
- and
- performing said development process on said photosensitive material after said exposure process.
A method of producing a ceramic green sheet utilizing an exposure process and a development process, comprising the steps of:
- attaching a photosensitive material containing a powder that has a specific electric characteristic on a front side surface of a member having a portion that can transmit light used in said exposure process, said front side surface being a surface on which a sheet is to be formed, and said photosensitive material having sensitivity to said light;
- irradiating said photosensitive material with said light from the backside of said member to perform said exposure process with such an exposure dose that said photosensitive material is exposed up to a predetermined thickness from said member is exposed;
- and
- performing said development process on said photosensitive material after said exposure process.
Dependencies are inferred from the claim text.