Valve design and configuration for fast delivery system
AssigneeApplied Materials, Inc.
InventorsVincent Ku, Ling Chen, Dien-Yeh Wu
Life of this patent
Estimating the term…
Abstract
Embodiments of the invention relate to an apparatus for rapid delivery of pulses of one or more reactants to a substrate processing chamber. In one embodiment, a valve assembly includes a valve body having at least two ports comprising a purge inlet and an outlet, a valve seat surrounding one of the ports, an annular groove formed around the valve seat coupling the purge inlet and the outlet, and a diaphragm assembly. The diaphragm assembly further includes a diaphragm movable to contact the valve seat, a piston coupled to the diaphragm, and a cylinder to house the piston. In another embodiment, the cylinder forms an actuation chamber having an internal volume of about 3.0 cm3.
Claims35
A pneumatic valve assembly, comprising:
- a valve body having at least two ports comprising a purge inlet and an outlet;
- a valve seat surrounding one of the ports;
- an annular groove formed around the valve seat coupling the purge inlet and the outlet;
- and
- a diaphragm assembly, comprising:
- a diaphragm movable to contact the valve seat;
- a piston coupled to the diaphragm;
- and
- a cylinder to house the piston.
A pneumatic valve assembly, comprising:
- a valve body having at least three ports comprising a purge inlet, an outlet, and a reactant inlet;
- a valve seat surrounding one of the ports;
- an annular groove formed around the valve seat coupling the purge inlet and the outlet;
- and
- a diaphragm assembly.
A pneumatic valve assembly, comprising:
- a valve body comprises a purge inlet, an outlet, and a reactant inlet;
- a valve seat surrounding the purge inlet, the outlet, or the reactant inlet;
- an annular groove formed around the valve seat coupling the purge inlet and the outlet;
- and
- a diaphragm assembly, comprising:
- a diaphragm movable to contact the valve seat;
- a piston coupled to the diaphragm;
- and
- a cylinder to house the piston.
A pneumatic valve assembly, comprising:
- a valve body having at least two ports comprising a purge inlet and an outlet;
- an annular groove coupling the purge inlet and the outlet;
- and
- a diaphragm assembly coupled to the valve body, wherein the diaphragm assembly comprises:
- a diaphragm;
- a piston coupled to the diaphragm;
- and
- a cylinder to house the piston, wherein the cylinder forms an actuation chamber having an internal volume of about 3.0 cm3 or less.
Dependencies are inferred from the claim text.