Quadrature reduction in mems gyro devices using quad steering voltages

A MEMS-type gyroscope, comprising:

• one or more proof masses configured to oscillate in a drive plane above a support substrate, each of said one or more proof masses being electrically grounded to the support substrate by one or more suspension springs;
• a sense electrode positioned adjacent to and parallel with each of the one or more proof masses;
• a sense bias voltage for inducing a charge between the one or more proof masses and corresponding sense electrode;
• one or more quad steering voltage members positioned adjacent to and parallel with each proof mass, each of said one or more quad steering voltage members being electrically coupled to a quad steering voltage, the quad steering voltage adapted to electrostatically reduce quadrature motion of the one or more proof masses;
• and
• sensing means for measuring the Coriolis force exerted on the one or more proof masses and outputting a rate signal corresponding to the rate of rotation of the gyroscope about an input axis.

A method for reducing quadrature motion in a gyroscope using quad steering voltages, comprising the steps of:

• providing a gyroscope having a proof mass configured to oscillate back and forth in a drive plane above a sense electrode;
• providing one or more quad steering voltage members adjacent the proof mass;
• and
• applying a quad steering voltage to the one or more quad steering voltage members to electrostatically attract the proof mass towards the sense electrode in a manner that reduces the quadrature motion of the proof mass.

A method for reducing quadrature motion in a gyroscope using quad steering voltages, comprising the steps of:

• providing a gyroscope having a proof mass configured to oscillate back and forth in a drive plane above a sense electrode;
• providing a quad steering voltage member laterally adjacent a first end of the sense electrode;
• and
• applying a quad steering voltage to the quad steering voltage member to electrostatically attract the proof mass towards the sense electrode when quadrature of the proof mass occurs.