Carbon nanotube films for hydrogen sensing
AssigneeUniversity of Florida Research Foundation, Inc.
InventorsAndrew Rinzler, Jennifer Sippel-Oakley, Byoung Kang, Hung-Ta Wang, Fan Ren, Stephen Pearton
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Abstract
A multi-layer H2 sensor includes a carbon nanotube layer, and a ultra-thin metal or metal alloy layer in contact with the nanotube layer. The ultra-thin metal or metal alloy layer is preferably from 10 to 50 angstroms thick. An electrical resistance of the layered sensor increases upon exposure to H2 and can provide detection of hydrogen gas (H2) down to at least 10 ppm, The metal or metal alloy layer is preferably selected from the group consisting of Ni, Pd and Pt, or mixtures thereof. Multi-layered sensors and can be conveniently operated at room temperature.
Claims19
A multi-layer hydrogen sensor, comprising:
- a carbon nanotube comprising layer, and
- an ultra-thin metal or metal alloy layer disposed on said carbon nanotube comprising layer, wherein an electrical resistance of said layered sensor increases upon exposure to H2.
A method of forming a layered hydrogen sensor, comprising the steps of:
- providing a substrate;
- forming an active sensor region on said substrate, said active sensor region comprising a carbon nanotube comprising layer disposed on or under an ultra-thin metal or metal alloy layer, and
- forming contacts to said active sensor region on either side of said active sensor region.
Dependencies are inferred from the claim text.