Piezoelectric element and method for manufacturing the same, ink jet recording head and ink jet printer
AssigneeSeiko Epson Corporation
InventorsSetsuya Iwashita, Koji Ohashi, Takamitsu Higuchi
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Abstract
A method for manufacturing a piezoelectric element includes the steps of forming a first electrode above a substrate, forming above the first electrode a piezoelectric layer composed of a piezoelectric material having a perovskite structure, and forming a second electrode above the piezoelectric layer, wherein the step of forming the first electrode includes forming a lanthanum nickelate layer that is oriented to a cubic (100) by a sputter method, and a ratio of nickel to lanthanum (Ni/La) in a target used for the sputter method is greater than 1 but smaller than 1.5.
Claims9
A method for manufacturing a piezoelectric element, comprising the steps of:
- forming a first electrode above a substrate;
- forming above the first electrode a piezoelectric layer composed of a piezoelectric material having a perovskite structure;
- and
- forming a second electrode above the piezoelectric layer,
- wherein the step of forming the first electrode includes forming a lanthanum nickelate layer oriented to a cubic (100) by a sputtering method, and a ratio of nickel to lanthanum (Ni/La) in a target used for the sputter method is greater than 1 but smaller than 1.5.
Dependencies are inferred from the claim text.