Roll printer with decomposed raster scan and X-Y distortion correction

9) An optical machine for creating an image of a master object on a format plane, including:

• a first assembly defining a master object plane and a format plane in spaced apart positions;
• a second assembly comprising a reflecting optical system wherein a concave mirror, a convex mirror and a concave mirror follow each other in series, the concave mirrors being spherical, of the same curvature, sharing approximately the same centers and being controllably movable with respect to each other for the purpose of introducing a slight change in magnification, for transferring successive parts of the image of the master object from the plane of the master object to the format plane at nearly unit magnification;
• a third assembly which moves the second assembly in a reciprocating motion in a first direction to provide a first dimension of an areal scan pattern;
• a fourth assembly coupled to the first and second assemblies for moving the first assembly incrementally in a second direction different from the first between movements of the second assembly to provide a second dimension of the areal scan pattern.

20) A system for recording images on a recording web disposed in a substantially planar disposition between a take-up side and a supply side and comprising:

• an areal platen disposed along the web and engageable to a substantial portion of the surface thereof;
• an imaging system disposed between a master object plane and a format plane along the width of the web, the imaging system including an illuminating source and optics providing a controllable beam for illuminating an object plane with a portion of an image of the master object;
• an optical transfer assembly for projecting an image of the master object across the web toward the format plane;
• a first drive for reciprocating the optical transfer assembly along a first direction substantially equal to the width of the web such that a first direction of raster scan is provided at the format plane;
• a second drive system engaging the vacuum platen for moving the web laterally relative to the first direction to provide a two dimensional raster action at the format plane, and
• a third drive means for the recording web for repetitively delineating images of the complete master object on successive segments of the web.

21) A system for providing precision images of the object on a photomask comprising:

• a web transport system for moving an image web substantially without twisting in a path between a supply region and a take-up region;
• a web handling device along the web transport system comprising a vacuum platen engaged against a region of the web and controllably movable along the direction of movement of the web;
• an imaging assembly disposed adjacent the web and including a light source, an optical magnification system, and focusing optics disposed in a multi-reflective path extending across the web path, the imaging assembly being disposed to project an image of a portion of the photomask at an objective position on the web;
• a control system for scanning the imaging assembly across a portion of the photomask in the direction across the web, and a control system for shifting the web incrementally longitudinally relative to the direction of movement of the optical imaging assembly so as to provide a two-dimensional raster image of the photomask image.

22) An optical projection system for recording images on a photomask serially on a recording web, wherein the recording web is advanced substantially without twisting between supply and takeup sides, comprising:

• a web transport system for advancing the web between supply and takeup locations;
• an imaging assembly disposed adjacent the web path, the assembly including a radiation source for illuminating a portion of the photomask, and optics defining a multiply refolded light path, and including magnification and focusing controls varying the path length of the fields, the light path leading to a format position on the web;
• a first raster scanning drive moving the imaging assembly along a first axis across the web to provide a first raster scan direction;
• a second raster scanning drive moving the web laterally to the first raster scan direction in timed relation to the first raster scan movement, and
• a control system for advancing the web an incremental distance when a complete raster has been provided.