Sample probability of fault function determination using critical defect size map
AssigneeInternational Business Machines Corporation
InventorsRobert Allen, Mervyn Tan
Life of this patent
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Abstract
Methods, systems and program products for determining a probability of fault (POF) function using critical defect size maps. Methods for an exact or a sample POF function are provided. Critical area determinations can also be supplied based on the exact or sample POF functions. The invention provides a less computationally complex and storage-intensive methodology.
Claims31
A method for determining a sampling of a probability of fault (POF) for an integrated circuit design layout, the method comprising the steps of:
- constructing a critical defect size map based on a layout geometry of the integrated circuit design under any distance measure defined by a polygonal unit shape;
- accumulating a convolved sampling of POF contributions of each critical defect size map face;
- and
- reconstructing an exact value of the POF at the sample points based on the accumulated convolutions.
A system for determining a sampling of a probability of fault (POF) for an integrated circuit design layout, the system comprising:
- means for constructing a critical defect size map based on a layout geometry of the integrated circuit design under any distance measure defined by a polygonal unit shape;
- means for accumulating a convolved sampling of POF contributions of each critical defect size map face;
- and
- means for reconstructing an exact value of the POF at the sample points based on the accumulated convolutions.
A program product stored on a computer readable medium for determining a sampling of a probability of fault (POF) for an integrated circuit design layout, the computer readable medium comprising program code for performing the following steps:
- constructing a critical defect size map based on a layout geometry of the integrated circuit design under any distance measure defined by a polygonal unit shape;
- accumulating a convolved sampling of POF contributions of each critical defect size map face;
- and
- reconstructing an exact value of the POF at the sample points based on the accumulated convolutions.
Dependencies are inferred from the claim text.