Probability of fault function determination using critical defect size map
AssigneeInternational Business Machines Corporation
InventorsRobert Allen, Mervyn Tan
Life of this patent
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Abstract
Methods, systems and program products for determining a probability of fault (POF) function using critical defect size maps. Methods for an exact or a sample POF function are provided. Critical area determinations can also be supplied based on the exact or sample POF functions. The invention provides a less computationally complex and storage-intensive methodology.
Claims18
A method of determining a probability of fault (POF) function for an integrated circuit design, the method comprising the steps of:
- constructing a critical defect size map based on a layout geometry of the integrated circuit design under any distance measure defined by a polygonal unit shape;
- and
- accumulating a POF contribution of each face of the critical defect size map to form a piece-wise two-degree polynomial function representing the POF function.
A system for determining a probability of fault (POF) function for an integrated circuit design, the system comprising:
- means for constructing a critical defect size map based on a layout geometry of the integrated circuit design under any distance measure defined by a polygonal unit shape;
- and
- means for accumulating a POF contribution of each face of the critical defect size map to form a piece-wise two-degree polynomial function representing the POF function.
A computer program product comprising a computer useable medium having computer readable program code embodied therein for determining a probability of fault (POF) function for an integrated circuit design, the program product comprising:
- program code configured to construct a critical defect size map based on a layout geometry of the integrated circuit design under any distance measure defined by a polygonal unit shape;
- and
- program code configured to accumulate a POF contribution of each face of the critical defect size map to form a piece-wise two-degree polynomial function representing the POF function.
Dependencies are inferred from the claim text.