Semiconductor test management system and method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorJoshua Huang
Life of this patent
Estimating the term…
Abstract
A system and method for semiconductor test management. A second computer receives a scrap rule from a first computer, acquires an initial scrap threshold corresponding to the scrap rule, stores the scrap rule as a SBC/SBL (Statistic BIN Control/Statistic BIN Limit) rule when a scrap condition therein is less or equally restrictive than the initial scrap threshold, acquires a CP (Circuit Probing) test result for a wafer or wafer lot and generates an advisory report for the wafer or wafer lot by carrying the CP test result into the stored SBC/SBL rules.
Claims20
A system for semiconductor test management, the system comprising:
- a rule provider providing a rule;
- and
- a computer receiving the rule from the provider, acquiring an initial threshold corresponding to the rule, determining whether a condition in the rule is more restrictive than the initial threshold, storing the rule when the condition is less or equally restrictive than the initial threshold, acquiring a CP (Circuit Probing) test result for a wafer or wafer lot, and generating an advisory report for the wafer or wafer lot by carrying the CP test result into the stored rules,
- wherein a follow-up action is taken on the wafer or wafer lot when the CP test result for the wafer or wafer lot satisfies the condition in the rule.
A system for semiconductor test management, the system comprising:
- a SBC/SBL (Statistic BIN Control/Statistic BIN Limit) rule provider;
- and
- a computer receiving a SBC/SBL rule from the SBC/SBL rule provider, determining whether the SBC/SBL rule is a scrap rule, acquiring an initial scrap threshold corresponding to the SBC/SBL rule when the SBC/SBL rule is the scrap rule, determining whether a scrap condition in the SBC/SBL rule is more restrictive than the initial scrap threshold, storing the SBC/SBL rule when the scrap condition is less or equally restrictive than the initial scrap threshold, acquiring a CP (Circuit Probing) test result for a wafer or wafer lot, and generating an advisory report for the wafer or wafer lot by carrying the CP test result into the stored SBC/SBL rules,
- wherein the scrap rule determines whether the wafer or wafer lot is scrapped when the CP test result for the wafer or wafer lot satisfies the scrap condition in the scrap rule.
A method of semiconductor test management, comprising the steps of:
- receiving a rule;
- acquiring an initial threshold corresponding to the rule;
- determining whether a condition in the rule is more restrictive than the initial threshold;
- storing the rule when the condition is less or equally restrictive than the initial threshold;
- and
- acquiring a CP (Circuit Probing) test result for a wafer or wafer lot and generating an advisory report for the wafer or wafer lot by carrying the CP test result into the stored rules,
- wherein a follow-up action is taken on the wafer or wafer lot when the CP test result for the wafer or wafer lot satisfies the condition in the scrap rule.
A method of semiconductor test management, comprising the steps of:
- receiving a SBC/SBL (Statistic BIN Control/Statistic BIN Limit) rule;
- determining whether the SBC/SBL rule is a scrap rule;
- acquiring an initial scrap threshold corresponding to the SBC/SBL rule when the SBC/SBL rule is the scrap rule;
- determining whether a scrap condition in the SBC/SBL rule is more restrictive than the initial scrap threshold;
- storing the SBC/SBL rule when the scrap condition is less or equally more restrictive than the initial scrap threshold;
- acquiring a CP (Circuit Probing) test result for a wafer or wafer lot;
- and
- generating an advisory report for the wafer or wafer lot by carrying the CP test result into the stored SBC/SBL rules,
- wherein the scrap rule determines whether the wafer or wafer lot is scrapped when the CP test result for the wafer or wafer lot satisfies the scrap condition in the scrap rule.
Dependencies are inferred from the claim text.