Closed loop control on liquid delivery system ECP slim cell
AssigneeApplied Materials, Inc.
InventorsRoy Nangoy, Allen D'Ambra, Yevgeniy Rabinovich, David Chen, Tao Li
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Abstract
A method for controlling liquid delivery in a processing chamber. The method includes generating an analog input (AI) signal proportional to a process variable and calculating an analog output (AO) signal based on a setpoint and a deadband. The setpoint is a target value of the process variable and the deadband is an allowable tolerance around the setpoint that determines when the control logic is activated to control the process variable. The method further includes transmitting the AO signal to a control device and adjusting the process variable proportional to the value of the AO signal.
Claims27
A method for controlling liquid delivery in a processing chamber, comprising:
- generating an analog input (AI) signal proportional to a process variable;
- calculating an analog output (AO) signal based on a setpoint and a deadband, wherein the setpoint is a target value of the process variable and the deadband is an allowable tolerance around the setpoint that determines when the control logic is activated to control the process variable;
- transmitting the AO signal to a control device;
- and
- adjusting the process variable proportional to the value of the AO signal.
A method of monitoring drift of a closed loop control system, comprising:
- generating an analog input signal proportional to a process variable being controlled to a target setpoint;
- calculating an analog output signal based on the analog input signal and the target setpoint for the process variable;
- determining a drift has occurred if the analog output signal is one of less than a lower voltage warning or greater than an upper voltage warning;
- and
- generating a warning.
Dependencies are inferred from the claim text.