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US 2006/0189725 A1Published application
Apparatus for calibrating optical scanner, method of manufacturing the same, and method of calibrating optical scanner using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJeo-young Shim, Sung-ouk Jung, Ji-na Namgoong, Kyu-tae Yoo, Jang-seok Ma
Life of this patent
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Abstract
Provided is a calibration apparatus for an optical scanner, including a substrate on which a molecule capable of forming an excimer is immobilized. A method of manufacturing the calibration apparatus and a method of calibrating an optical scanner using the calibration apparatus are also provided.
Claims19
A calibration apparatus for calibrating an optical scanner, comprising a substrate on which a molecule capable of forming an excimer is immobilized.
A method of manufacturing a calibration apparatus for an optical scanner, the method comprising:
- reacting a substrate coated with a functional group and a molecule capable of forming an activated excimer to immobilize the molecule on the substrate.
Dependencies are inferred from the claim text.