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US 2006/0189093 A1Published application
Adhesive with differential optical properties and its application for substrate processing
AssigneeIntel Corporation
InventorsDaoqiang Lu, Eric Li
Life of this patent
Estimating the term…
Abstract
An adhesive adapted with particular optical properties, and its use to couple a substrate to a substrate holder during substrate processing are disclosed. After processing the substrate, the optical properties of the adhesive may be exploited to locate and/or remove adhesive residue that may be present on the substrate.
Claims23
A method, comprising:
- providing a substrate, the substrate having first electromagnetic responsive material that emits light of a first spectrum responsive to electromagnetic radiation;
- and
- coupling the substrate to a support substrate with an adhesive, the adhesive having second electromagnetic responsive material that emits light of a second spectrum responsive to electromagnetic radiation, the first and second spectrums being sufficiently different to facilitate detection of adhesive residues left after decoupling the support substrate from the substrate.
An adhesive composition, comprising:
- an adhesive base;
- and
- a moiety, the moiety having a first fluorescent spectrum that is sufficiently different from a second fluorescent spectrum of a substrate, to facilitate detection of adhesive residue left on the substrate, after the substrate is decoupled from a support substrate that is coupled to the substrate using the adhesive composition.
A system, comprising:
- a substrate holder adapted to hold a substrate having first electromagnetic responsive material that emits light of a first spectrum responsive to electromagnetic radiation;
- and
- an adhesive applicator adapted to store and dispense an adhesive to the substrate for coupling the substrate to the substrate holder, the adhesive having second electromagnetic responsive material that emits light of a second spectrum responsive to electromagnetic radiation, and the first and second spectrums being sufficiently different to facilitate detection of adhesive residue left after decoupling of the substrate from the substrate holder.
A method comprising:
- decoupling a substrate holder from a substrate to which the substrate holder is coupled to using an adhesive, the substrate having first electromagnetic responsive material that emits light of a first spectrum, responsive to electromagnetic radiation, and the adhesive having second electromagnetic responsive material that emits light of a second spectrum responsive to electromagnetic radiation, the first and second spectrums being sufficiently different to facilitate detection of adhesive residues left after the decoupling;
- and
- irradiating the substrate, after said decoupling, to detect for adhesive residue.
Dependencies are inferred from the claim text.