Method for fabricating a sublithographic contact structure in a memory cell

A method for fabricating a sublithographic contact structure in a memory cell in a semiconductor component comprising:

• providing a front-end-of-line (FEOL) finished processed semiconductor wafer with at least one electrical connecting contact connected to an active structure on one of its two opposite surfaces;
• depositing a first insulator layer made of a first dielectric material on the semiconductor wafer at least over the electrical connecting contact;
• forming a trench structure with a bottom and walls essentially perpendicular to the wafer surface in the first insulator layer at least partly over the electrical connecting contact;
• depositing a first layer made of a dielectric spacer material at least over the trench structure and anisotropically etching back the spacer material layer in a direction essentially perpendicular to the wafer surface as far as the bottom of the trench structure in such a way that first spacers remain on the walls of the trench structure, a first sublithographic dimension (SL) being formed in the region between the first spacers situated on mutually opposite walls in at least one direction (x) parallel to the wafer surface;
• etching the insulator layer in the region between the first spacers situated on mutually opposite walls as far as the connecting contact for the purpose of forming a first passage hole, the first spacers being used as an etching mask;
• depositing a layer made of an electrically conductive material at least over the first passage hole and partially etching back the layer made of the electrically conductive material in the first passage hole for the purpose of forming a first contact electrode;
• depositing a layer made of a resistance change material over the first passage hole and partially etching back the resistance change material in the first passage hole for the purpose of forming a resistance change material zone;
• and
• depositing a layer made of an electrically conductive material on the resistance change material zone for the purpose of forming a second contact electrode.

A method for fabricating a sublithographic contact structure in a memory cell in a semiconductor component, comprising:

• providing a front-end-of-line (FEOL) finished processed semiconductor wafer with at least one electrical connecting contact connected to an active structure on one of its two opposite surfaces;
• depositing a first insulator layer made of a first dielectric material on the semiconductor wafer at least over the electrical connecting contact;
• forming a trench structure with a bottom and walls essentially perpendicular to the wafer surface in the first insulator layer at least partly over the electrical connecting contact;
• depositing a first layer made of a dielectric spacer material at least over the trench structure and anisotropically etching back the spacer material layer in a direction essentially perpendicular to the wafer surface as far as the bottom of the trench structure in such a way that first spacers remain on the walls of the trench structure, a first sublithographic dimension (SL) being formed in the region between the first spacers situated on mutually opposite walls in at least one direction (x) parallel to the wafer surface;
• etching the insulator layer in the region between the first spacers situated on mutually opposite walls as far as the connecting contact for the purpose of forming a first passage hole, the first spacers being used as an etching mask;
• depositing a layer made of an electrically conductive material at least over the first passage hole and partially etching back the layer made of the electrically conductive material in the first passage hole for the purpose of forming a first contact electrode;
• depositing a layer made of a resistance change material over the first passage hole and partially etching back the resistance change material in the first passage hole for the purpose of forming a resistance change material zone;
• depositing a layer made of an electrically conductive material on the resistance change material for the purpose of forming a second contact electrode, partially etching back the second contact electrode in the region between the first spacers;
• partially isotropically etching back the first spacers on the walls of the trench structure in a direction (x) essentially parallel to the wafer surface for the purpose of increasing the distance between the first spacers situated on opposite walls;
• selectively isotropically etching the second dielectric material in a direction (y) essentially perpendicular to the wafer surface;
• conformally depositing a third insulator layer made of a third dielectric material at least in the region of the trench structure;
• and
• forming an electrically conductive connection to the second contact electrode in the third insulator layer.

A method for fabricating a sublithographic contact structure in a memory cell in a semiconductor component, comprising:

• providing a front-end-of-line (FEOL) finished processed semiconductor wafer with at least one electrical connecting contact connected to an active structure on one of its two opposite surfaces;
• depositing a first insulator layer made of a first dielectric material on the semiconductor wafer at least over the electrical connecting contact;
• forming a trench structure with a bottom and walls essentially perpendicular to the wafer surface in the first insulator layer at least partly over the electrical connecting contact;
• depositing a first layer made of a dielectric spacer material at least over the trench structure and anisotropically etching back the spacer material layer in a direction essentially perpendicular to the wafer surface as far as the bottom of the trench structure in such a way that first spacers remain on the walls of the trench structure, a first sublithographic dimension (SL) being formed in the region between the first spacers situated on mutually opposite walls in at least one direction (x) parallel to the wafer surface;
• etching the insulator layer in the region between the first spacers situated on mutually opposite walls as far as the connecting contact for the purpose of forming a first passage hole, the first spacers being used as an etching mask;
• depositing a layer made of an electrically conductive material at least over the first passage hole and partially etching back the layer made of the electrically conductive material in the first passage hole for the purpose of forming a first contact electrode;
• depositing a layer made of a resistance change material over the first passage hole and partially etching back the resistance change material for the purpose of forming a resistance change material zone and removing the first spacers and the resistance change material situated between the latter;
• depositing a second layer made of a spacer material at least over the trench structure and anisotropically etching back the spacer material layer in a direction essentially perpendicular to the wafer surface until the resistance change material is uncovered, in such a way that second spacers remain on the walls of the trench structure, a second sublithographic dimension, which is different from the first sublithographic dimension, being formed in the region between the second spacers situated on mutually opposite walls in at least one direction (x) parallel to the wafer surface;
• and
• depositing a layer made of an electrically conductive material on the resistance change material for the purpose of forming a second contact electrode.

A method for fabricating a sublithographic contact structure in a memory cell in a semiconductor component, which comprises the following steps of:

• providing a front-end-of-line (FEOL) finished processed semiconductor wafer with at least one electrical connecting contact connected to an active structure on one of its two opposite surfaces;
• depositing a first insulator layer made of a first dielectric material on the semiconductor wafer at least over the electrical connecting contact;
• forming a trench structure with a bottom and walls essentially perpendicular to the wafer surface in the first insulator layer at least partly over the electrical connecting contact;
• depositing a first layer made of a dielectric spacer material at least over the trench structure and anisotropically etching back the spacer material layer in a direction essentially perpendicular to the wafer surface as far as the bottom of the trench structure in such a way that first spacers remain on the walls of the trench structure, a first sublithographic dimension (SL) being formed in the region between the first spacers situated on mutually opposite walls in at least one direction (x) parallel to the wafer surface;
• etching the insulator layer in the region between the first spacers situated on mutually opposite walls as far as the connecting contact for the purpose of forming a first passage hole, the first spacers being used as an etching mask;
• depositing a layer made of an electrically conductive material at least over the first passage hole and partially etching back the layer made of the electrically conductive material in the first passage hole for the purpose of forming a first contact electrode;
• depositing a layer made of a resistance change material over the first passage hole and partially etching back the resistance change material for the purpose of forming a resistance change material zone and removing the first spacers and the resistance change material situated between the latter;
• depositing a second layer made of a spacer material at least over the trench structure and anisotropically etching back the spacer material layer in a direction essentially perpendicular to the wafer surface until the resistance change material is uncovered, in such a way that second spacers remain on the walls of the trench structure, a second sublithographic dimension, which is different from the first sublithographic dimension, being formed in the region between the second spacers situated on mutually opposite walls in at least one direction (x) parallel to the wafer surface;
• depositing a layer made of an electrically conductive material on the resistance change material for the purpose of forming a second contact electrode;
• partially etching back the contact electrode in the region between the second spacers;
• partially isotropically etching back the spacer material on the walls of the trench structure in a direction (x) essentially parallel to the wafer surface for the purpose of increasing the distance between the second spacers situated on opposite walls in a direction (x) parallel to the wafer surface;
• selectively isotropically etching the second dielectric material in a direction (y) essentially perpendicular to the wafer surface;
• conformally depositing a third insulator layer made of a third dielectric material at least in the region of the trench structure;
• and
• forming an electrically conductive connection to the second contact electrode in the third insulator layer.

A method for fabricating sublithographic contact structures in memory cells in a semiconductor component, comprising:

• providing a front-end-of-line (FEOL) finished processed semiconductor wafer with at least two electrical connecting contacts each connected to an active structure on one of its two opposite surfaces;
• depositing an insulator layer made of a dielectric material on the semiconductor wafer at least partially over the two connecting contacts;
• forming an etching mask on the insulator layer;
• etching the dielectric as far as the connecting contacts for the purpose of forming a first passage hole;
• depositing a layer made of an electrically conductive material and partially etching back the layer made of an electrically conductive material for the purpose of forming a first contact electrode;
• depositing a layer made of a resistance change material and partially etching back the resistance change material in the first passage hole for the purpose of forming a resistance change material zone;
• depositing a layer made of an electrically conductive material. and partially etching back the electrically conductive material in the first passage hole for the purpose of forming a second contact electrode;
• depositing a layer made of a spacer material and anisotropically etching back the spacer material layer in a direction (y) essentially perpendicular to the wafer surface in the first passage hole until the second contact electrode is uncovered, in such a way that first spacers remain on the walls of the first passage hole and the first spacers have a sublithographic dimension (SL) in at least one direction (x) parallel to the wafer surface;
• etching the second contact electrode, the resistance change material zone and the first contact electrode as far as the connecting contacts, the first spacers being used as an etching mask, whereby a sublithographic contact structure is formed;
• and
• forming an etching mask at least over the sublithographic contact structure and etching the sublithographic contact structure for the purpose of producing two sublithographic contact structure sections.