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US 2006/0189039 A1Published application
Fabrication of parascan tunable dielectric chips
OwnerChen Zhang, John King +1inventors
InventorsChen Zhang, John King, Luna Chiu
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Abstract
An embodiment of the present invention provides a method, comprising fabricating a tunable dielectric chip by defining a critical area on a dielectric material via patterning and metallization and encapsulating said critical area.
Claims21
A method of fabricating tunable dielectric chips, comprising the steps of:
- (a) defining a critical area on a thick film tunable dielectric via patterning and metallization;
- and
- (b) encapsulating said critical area in order to protect the critical area from moisture and other contaminations
A method, comprising:
- fabricating a tunable dielectric chip by defining a critical area on a dielectric material via patterning and metallization;
- and
- encapsulating said critical area.
Dependencies are inferred from the claim text.