Chamber component having grooved surface
AssigneeApplied Materials, Inc.
InventorsBrian West, Maocheng Li, Hong Wang
Life of this patent
Estimating the term…
Abstract
A substrate processing chamber component capable of being exposed to an energized gas in a process chamber has a component structure, and a surface on the structure with first and second spiral grooves, which can oppose one another. Process residues adhere to the surface during processing of a substrate in an energized gas to reduce contamination of the substrate.
Claims25
A component capable of being exposed to an energized gas in a substrate processing chamber, the component comprising:
- (a) a component structure having a surface comprising first and second spiral grooves that oppose one another,
- whereby process residues adhere to the spiral grooves on the surface of the component structure during processing of a substrate in the energized gas in the substrate processing chamber, thereby reducing contamination of the substrate by the process residues.
A chamber component capable of being exposed to an energized gas in a substrate processing chamber, the component comprising:
- (a) a component structure having a textured surface comprising:
- (i) a first textured pattern region having first textured features that are spaced apart from one another and that each have a first depth and first density, and
- (ii) a second textured pattern region having second textured features that are spaced apart from one another and that each have a second depth and second density,
- wherein at least one of the second depth and the second density is other than the first depth and the first density,
- whereby process residues adhere to the surface during processing of a substrate to reduce contamination of the substrate.
A method of fabricating a component for a substrate processing chamber, the method comprising:
- (a) providing a component structure having a surface;
- and
- (b) machining into the surface, first and second spiral grooves that oppose one another, each of the grooves having a depth of at least about 0.25 mm.
Dependencies are inferred from the claim text.