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US 2006/0188648 A1Published application
Method of forming a coated film, method of forming an electronic device, and method of manufacturing an electron emission element
AssigneeSeiko Epson Corporation
InventorIchio Yudasaka
Life of this patent
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Abstract
A slit forming process with respect to a coated film, includes: forming a step pattern having an end part on a substrate; coating a liquid material for forming a coated film on the substrate in the manner of covering at least the end part of the step pattern; and forming the coated film by drying the coated liquid material, together with forming a slit at a position corresponding to the end part of the step pattern.
Claims6
A method of forming a coated film on a substrate, comprising:
- forming a step pattern on the substrate;
- applying a liquid material on the step pattern over the substrate, the liquid material covering at least a part of the step pattern;
- and
- evaporating the liquid material to form the coated film, the coated film having a slit at a position corresponding to the step pattern.
1 more element
A method of manufacturing an electron emission element, comprising:
- forming a pair of electrodes on the substrate;
- forming a step pattern between the element electrodes;
- applying a liquid material to the step pattern, the liquid material including a conductive material, the liquid material covering at least a part of the step pattern;
- and
- evaporating the liquid material to form a conductive film, the conductive film having a slit at a position corresponding to the step pattern.
2 more elements
A method of manufacturing an electron emission element, comprising:
- forming a step pattern on a substrate;
- applying a liquid material to the step pattern, the liquid material including a conductive material, the liquid material covering at least a part of the step pattern;
- and
- evaporating the liquid material to form a conductive film, the conductive film having a slit at a position corresponding to the step pattern, the conductive film being a pair of electrodes.
1 more element
Dependencies are inferred from the claim text.