Back to results
US 2006/0187996 A1Published application
Laser generator
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsNobuyuki Haji, Satoshi Eguchi, Atsuki Yamamoto, Nobuo Shinno
Life of this patent
Estimating the term…
Abstract
Flow laminators are attached to gas introducing parts installed in a laser generator preventing impurities from attaching to surfaces of a translucent mirror and a condensing lens. The flow laminators prevent airflow from producing a turbulent flow and air on the surface of the mirror and the lens are cleaned up, therewith reducing attachment of impurities further.
Claims9
A laser generator comprising:
- a laser generating part including a mirror outputting a laser light,
- a laser-introducing duct guiding the laser beam output by the laser generating part,
- a light path duct installed next to the laser introducing duct and guiding the laser beam,
- a condensing lens placed at an exit of the light path duct and condensing the laser beam, and
- at least one of
- a pair of a first gas introducing part placed near the mirror at the laser-introducing duct and introducing gas into the laser-introducing duct, and a first flow laminator placed at the first gas introducing part and regulating flow of the gas, and
- a pair of a second gas introducing part placed near the condensing lens at the light path duct and introducing the gas into the light path duct, and a second flow laminator placed at the second gas introducing part and regulating flow of the gas.
4 more elements
Dependencies are inferred from the claim text.