Fabricating micro devices using sacrificial materials
AssigneeSpatial Photonics, Inc.
InventorShaoher Pan
Life of this patent
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Abstract
A method of fabricating a tiltable micro mirror plate includes forming a substrate comprising an upper surface and a hinge support post in connection with the upper surface, disposing over the substrate a first sacrificial material selected from the group of amorphous carbon, polyarylene, polyarylene ether, and hydrogen silsesquioxane, depositing one or more layers of structural materials over the first sacrificial material, forming an opening in the one or more layers of structural materials, wherein the opening can provide access from outside to the first sacrificial material below the one or more layers of structural materials, and removing the first sacrificial material to form the tiltable micro mirror plate in connection with the hinge support post.
Claims27
A method of fabricating a tiltable micro mirror plate, comprising:
- forming a substrate comprising an upper surface and a hinge support post in connection with the upper surface;
- disposing a first sacrificial material over the substrate, wherein the first sacrificial material is selected from the group of amorphous carbon, polyarylene, polyarylene ether, and hydrogen silsesquioxane;
- depositing one or more layers of structural materials over the first sacrificial material;
- forming an opening in the one or more layers of structural materials, wherein the opening can provide access from outside to the first sacrificial material below the one or more layers of structural materials;
- and
- removing the first sacrificial material to form the tiltable micro mirror plate in connection with the hinge support post.
A method of fabricating a micro structure, comprising:
- forming a substrate comprising a first structure portion having a first height and a second structure portion having a second height higher than the first height;
- disposing a first sacrificial material over the substrate, wherein the first sacrificial material is selected from the group of amorphous carbon, polyarylene, polyarylene ether, and hydrogen silsesquioxane, and wherein the sacrificial material covers at least the first structure portion;
- depositing a layer of a first structural material over the first sacrificial material;
- forming an opening in the layer of the first structural material, wherein the opening can provide access from outside to the first sacrificial material below the layer of the first structural material;
- and
- removing the first sacrificial material to form a third structure portion in connection with the second structure portion, wherein at least part of the third structure portion is above the first structure portion.
Dependencies are inferred from the claim text.