Electron-beam actuated light modulator with a mechanical stop

A light modulator, comprising:

• an array of electron beam addressable mirror elements, the array including a actuatable mirror element including a mirror portion supported by a pedestal extending outward from the substrate and a hinge portion disposed intermediate the pedestal and the mirror portion, the mirror portion of the mirror element having a first nominal charge position essentially parallel to the substrate whereto the mirror is returned by dissipation of charge and a tilted charged position tilted inward toward the substrate, the mirror actuatable in a first direction from the first position to the second position by interception of electrons from an electron beam, and actuatable in a second direction from the second position to the first position by dissipation of said charge;
• an electrode carried by the substrate adjacent the actuatable mirror element configured to cooperate with the actuatable mirror element and an electron beam in moving the mirror element from the first position to the second position;
• a charge dissipation pathway, configured for controllably dissipating charge on the mirror element in moving the mirror element from the second position to the first position;
• a stop carried by the substrate and configured to inhibit outward movement of the mirror portion of the mirror element beyond the first position.

A method of making a light modulator, comprising:

• providing a substrate;
• forming a post on the substrate;
• forming a mirror element carried by the post and configured to move in a first direction toward the substrate and in a second direction away from the substrate;
• forming an electrode adjacent the mirror element;
• forming a controllable charge dissipation pathway between the electrode and the mirror element;
• and
• forming a stop carried by the substrate and configured to stop movement of the mirror element in the second direction beyond the stop.

A spatial light modulator, including:

• an array of electron beam addressable mirror elements, the array including a actuatable mirror element including a mirror portion supported by a pedestal extending outward from the substrate and a hinge portion disposed intermediate the pedestal and the mirror portion, the mirror portion of the mirror element having a first nominal charge position essentially parallel to the substrate whereto the mirror is returned by dissipation of charge and a tilted charged position tilted inward toward the substrate, the mirror actuatable in a first direction from the first position to the second position by interception of electrons from an electron beam, and actuatable in a second direction from the second position to the first position by dissipation of said charge;
• an electrode carried by the substrate adjacent the actuatable mirror element configured to cooperate with the actuatable mirror element and an electron beam in moving the mirror element from the first position to the second position;
• a charge dissipation pathway, further including a resistor configured for dissipating charge on the mirror element at a known rate in moving the mirror element from the second position to the first position in a controlled way;
• and
• a stop carried by the substrate and configured to inhibit outward movement of the mirror portion of the mirror element beyond the first position.

A light modulator, comprising:

• at least one mirror element having a first position and a second position;
• at least one electrode adjacent a respective at least one mirror element;
• means for moving the element between the first and second position;
• means for placing charge on the element to move the element between the first and second position;
• means for removing charge on the element to move the element between the second and first positions including a controllable charge dissipation pathway between the at least one electrode and the at least one mirror element;
• and
• means for preventing oscillations of the element after it returns to the first position.