Method for calibrating a metrology tool and a system
AssigneeApplied Materials Israel Ltd.
InventorsNadav Wertsman, Ovadya Menadeva
Life of this patent
Estimating the term…
Abstract
A method for calibrating a metrology tool, the method includes: determining a relationship between an upper portion of a milled reference structural element and between a lower portion of the milled reference structural element; and defining a calibration parameter in response to the relationship. A metrology system that includes: a miller adapted to mill a reference structural element; and a measurement device adapted to determine a relationship between an upper portion of a milled reference structural element and between a lower portion of the milled reference structural element; wherein the metrology system is further adapted to define a calibration parameter in response to the relationship.
Claims12
A method for calibrating a metrology tool, the method comprising:
- determining a relationship between an upper portion of a milled reference structural element and between a lower portion of the milled reference structural element;
- and
- defining a calibration parameter in response to the relationship.
A metrology system comprising:
- a miller adapted to mill a reference structural element;
- and a
- measurement device adapted to determine a relationship between an upper portion of a milled reference structural element and between a lower portion of the milled reference structural element;
- wherein
- the metrology system is further adapted to define a calibration parameter in response to the relationship.
Dependencies are inferred from the claim text.