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US 2006/0187437 A1Published application
Alignment apparatus and exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorKeiji Emoto
Life of this patent
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Abstract
An alignment apparatus includes a first support member having a reference surface which movably supports an object, a driving unit which moves the object in at least one direction on the reference surface and aligns the object at a predetermined position, and a second support member which is provided separately from the first support member and supports a heating unit of the driving unit through a bearing.
Claims8
An alignment apparatus comprising:
- a first support member having a reference surface which movably supports an object;
- a driving unit which moves the object in at least one direction on the reference surface and aligns the object at a predetermined position;
- and
- a second support member which is provided separately from said first support member and supports a heating unit of said driving unit through a bearing.
1 more element
3-6. (canceled)
(canceled)
Dependencies are inferred from the claim text.