US 2006/0187403 A1 · Micro polymerization catalyzed by external acid source for chemical lithography

Abstract

A method for generating images in polymers comprising: preparing a template with an extruding desired pattern; contacting a surface of a polymer with a desired pattern of the extruded surface of the template; treating the surface of the polymer with at least one of a liquid acid and vapor; treating the surface of the polymer with a high temperature for crosslinking; separating the template and polymer and revealing an acid imprint of the desired pattern on the surface of the polymer; baking the polymer to drive diffusion of the acid; and developing the polymer with at least one of a wet and dry process to produce a negative pattern in the polymer.

Claims2

Dependent claims

A method for generating images in polymers comprising:

preparing a template with an extruding desired pattern;
forming a thin film of acid on the surface of the template;
contacting a surface of a polymer with the desired pattern of the extruded surface of the template;
separating the template and polymer to reveal an acid imprint of the desired pattern on the surface of the polymer;
baking the polymer to drive diffusion of the acid;
and
developing the polymer with at least one of a wet and dry process to produce a positive pattern in the polymer.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

11/330,088Filed 12 Jan 2006

Priority

12 Jan 2005

Published

24 Aug 2006

Term ends

Not estimatedThe source records don’t support an estimate.

Classification9 codes

G03F 7/0002
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g.…
B41M 1/30
Printing on other surfaces than ordinary paper: on organic plastics, horn or similar materials
B41M 1/305
On organic plastics, horn or similar materials: using mechanical, physical or chemical means, e.g. corona discharge, etching or organic solvents,…
B82Y 10/00
Nanotechnology for information processing, storage or transmission

Micro polymerization catalyzed by external acid source for chemical lithography

Life of this patent

Micro polymerization catalyzed by external acid source for chemical lithography

Life of this patent

Abstract

Claims2