Solid State imaging device and method for producing the same
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorKenji Yokozawa
Life of this patent
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Abstract
A solid state imaging device comprises a plurality of pixels arranged in a matrix, each of the pixels including: a substrate; a photoelectric conversion element for converting light to electric charges; and a color filter formed on the photoelectric conversion element for color separation. The color filter is a layered color filter including a dye-contained color filter layer and a pigment-dispersed color filter layer formed on the dye-contained color filter layer, the dye-contained color filter layer and the pigment-dispersed color filter layer having the same hue.
Claims11
A solid state imaging device, comprising
- a plurality of pixels arranged in a matrix, each of the pixels including:
- a substrate;
- a photoelectric element for converting light to electric charges;
- and
- a color filter formed on the photoelectric element for color separation,
- wherein the color filter is a layered color filter including a dye-contained color filter layer and a pigment-dispersed color filter layer formed on the dye-contained color filter layer.
A method for producing a solid state imaging device, comprising the steps of:
- forming a photoelectric element for converting light to electric charges in a substrate;
- and
- forming a layered color filter for color separation on the photoelectric element,
- wherein the step of forming the layered color filter includes:
- forming a first material film of a dye-contained material, and
- forming a second material film of a pigment-dispersed material on the first material film, and
- exposing the first material film and the second material film simultaneously, and
- developing the first material film and the second material film.
Dependencies are inferred from the claim text.