Noise measuring system, noise measuring method, and semiconductor device

Abstract

To measure noise generated within a semiconductor device at a high speed and at high accuracy. A semiconductor device 1 includes an output driver circuit 5 for generating noise on wiring for a power supply Vdd targeted for noise measurement using a trigger signal S input from measuring equipment 2 and a noise measuring circuit 3. The noise measuring circuit 3 includes a comparator circuit for comparing a voltage on the wiring for the power supply Vdd with a reference voltage Vref supplied from the measuring equipment 2 and outputting a result of comparison, and two latch circuits for respectively holding the change of the result of comparison to one state and the change of the result of comparison to the other state, for output to the measuring equipment. The measuring equipment 2 for measuring the noise in the semiconductor device changes the reference potential Vref, monitors times from a change of the trigger signal S which becomes a trigger for noise generation, to changes of output signals OUTP and OUTN of the two latch circuits, and plots the reference voltage Vref and timings of the output changes, thereby estimating the waveform of the noise.

Dependencies are inferred from the claim text.