Probe card
AssigneeStar Technologies Inc.
InventorsChoon-Leong Lou, Mei-Shu Hsu
Life of this patent
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Abstract
The present probe card comprises a circuit board, a platform fixed on the circuit board, a tunable stage positioned on the platform, a probe carrier positioned on the tunable stage and at least one probe positioned on the probe carrier. The tunable stage comprises a stationary part positioned on the platform, a movable part for loading the probe carrier and a driving mechanism connecting the stationary part and the movable part. The probe carrier is positioned on the movable part and the relative position between the probe on the probe carrier and a DUT can be adjusted by the driving mechanism.
Claims6
A probe card, comprising:
- a circuit board;
- at least a first probe;
- a tunable stage positioned on one surface of the circuit board for adjusting the relative position between the first probe and a device under test;
- a supporter positioned on the other surface of the circuit board;
- and
- at least one DC probe positioned on the supporter.
Dependencies are inferred from the claim text.