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US 2006/0186547 A1Published application
Light shield for CMOS imager
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWen-De Wang, Dun-Nian Yaung, Shou-Gwo Wuu, Chung-Yi Yu
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Abstract
System and method for providing a light shield for a CMOS imager is provided. The light shield comprises a structure formed above a point between a photo-sensitive element and adjacent circuitry. The structure is formed of a light-blocking material, such as a metal, metal alloy, metal compound, or the like, formed in dielectric layers over the photo-sensitive elements.
Claims19
A CMOS image sensor comprising:
- a photo-sensitive element in a substrate;
- one or more dielectric layers formed over the substrate;
- and
- an electrically conductive material formed in a plurality of the dielectric layers, the electrically conductive material being positioned over a point between the photo-sensitive element and adjacent circuitry, the electrically conductive material comprising at least a single plug formed through the plurality of dielectric layers.
1 more element
A method for forming a CMOS image sensor, the method comprising:
- forming a photo-sensitive element on a substrate;
- forming a plurality of dielectric layers over the substrate;
- forming an opening in the plurality of the dielectric layers, the opening being positioned above a point between the photo-sensitive element and adjacent circuitry;
- and
- filling the opening with an electrically conductive material.
2 more elements
A CMOS image sensor comprising:
- a photodiode and a pinned layer in a substrate;
- one or more dielectric layers formed over the substrate;
- and
- a light shield comprising metal formed in a plurality of the dielectric layers, the light shield being positioned over a point between the photodiode and adjacent MOS circuitry, the light shield comprising a single plug formed through the plurality of dielectric layers, the MOS circuitry comprising switching transistor and reset transistor.
1 more element
Dependencies are inferred from the claim text.