Flexible device and method of manufacturing the same
AssigneeKoninklijke Philips Electronics N. V.
InventorsRonald Dekker, Theodorus Michielsen
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Abstract
The rollable device of the invention comprises a substrate of an insulating material (12) with apertures (15) extending from a first to a second side. On the first side switching elements (13) are present, as well as interconnect lines and the like, covered by a coating of organic material (3). On the second side a functional layer is present. Examples of such functional layers include capacitors, antennas and particularly electro-optical layers. Thus, with a rollable display that may include an antenna and a driver circuit is obtained.
Claims13
A flexible monolithic electronic device provided with
- an insulating layer of electrically insulating material having a first side and an opposed second side, which insulating layer is provided with a first aperture extending from the first to the second side;
- an active layer of a semiconductor material on the first side of the insulating layer, in and on which active layer at least one switching element is defined, which element is provided with a first electrode in the active layer;
- a flexible coating acting as a protective cover for the at least one switching element,
- a functional layer being present on the second side of the insulating layer and being connected to the first electrode through the first aperture in the insulating layer.
A flexible monolithic electronic device provided with
- a substrate of a semiconductor material in and on which substrate at least one switching element is defined, which element is provided with a first electrode in the active layer, the substrate being structured in an island-like shape;
- an insulating layer of electrically insulating material having a first side and an upward second side, which layer is provided with a first aperture extending from the first to the second side, at which first side the substrate is present;
- a flexible coating acting as a protective cover for the at least one switching element that is present at the second side of the insulating layer,
- a functional layer being present on the first side of the insulating layer and being connected to the first electrode through the first aperture in the insulating layer.
A method of manufacturing a flexible monolithic electronic device comprising a plurality of switching elements, which method comprises the steps of:
- providing a substrate having a first side and an opposed second side, on which first side an active layer of a semiconductor material is present, in and on which active layer switching elements are provided, first electrodes of the switching elements being present in the active layer,
- removing the active layer partially, such that a functional entity comprising a plurality of switching elements is present on at least one island;
- applying a coating of a flexible material to the first side of the substrate, thus covering the at least one island, the coating being provided with protection areas on side faces of the coating;
- temporarily attaching a carrier substrate to the first side of the substrate;
- removing the substrate from the second side, including a wet-chemical etching step by an etchant whereby the coating is protected through the protection areas;
- and
- providing a functional layer on the second side that is connected to at least one first electrode through an aperture in an insulating layer.
Dependencies are inferred from the claim text.