Laminated structure, method of manufacturing the same and ultrasonic transducer array

A method of manufacturing a plurality of laminated structures in which at least a first electrode layer, a dielectric layer and a second electrode layer are stacked in this order, said method comprising the steps of:

• (a) forming a dielectric layer;
• (b) forming a first electrode layer as an upper layer of said dielectric layer formed at step (a) by alternately disposing first electrode materials and second electrode materials different from said first electrode materials;
• (c) forming a dielectric layer as an upper layer of said first electrode layer formed at step (b);
• (d) forming a second electrode layer as an upper layer of said dielectric layer formed at step (c) by alternately disposing said first electrode materials and said second electrode materials reversely to positional relationship in said first electrode layer;
• (e) cutting a laminated structure formed at steps (a) to (d) in a stacked direction to divide the laminated structure into the plurality of laminated structures such that, with respect to each of the divided plurality of laminated structures, an end surface of the first electrode material in said first electrode layer and an end surface of the second electrode material in said second electrode layer are exposed in a first side region, and an end surface of the second electrode material in said first electrode layer and an end surface of the first electrode material in said second electrode layer are exposed in a second side region different from said first side region;
• and
• (f) forming an insulating film on the end surface of said second electrode material exposed in each of the first and second side regions with respect to each of the divided plurality of laminated structures.