Image sensor and method for fabricating the same
AssigneeSamsung Electronics Co., Ltd.
InventorHyun-Pil Noh
Life of this patent
Estimating the term…
Abstract
An image sensor and a method for fabricating the image sensor are provided. The image sensor includes a doped layer of a first conductivity type formed in a photodiode region defined in a semiconductor substrate, a first epitaxial layer of a second conductivity type and a second epitaxial layer of the second conductivity type formed on the semiconductor substrate in which the doped layer has been formed. Moreover, the first epitaxial layer has a bandgap energy different from that of the second epitaxial layer.
Claims20
An image sensor comprising:
- a doped layer of a first conductivity type formed in a photodiode region defined in a semiconductor substrate;
- and
- a first epitaxial layer of a second conductivity type and a second epitaxial layer of the second conductivity type formed on the semiconductor substrate in which the doped layer has been formed, the first epitaxial layer having bandgap energy different from that of the second epitaxial layer.
A method for fabricating an image sensor, the method comprising:
- forming a doped layer of a first conductivity type in a photodiode region defined in a semiconductor substrate;
- and
- forming a first epitaxial layer of a second conductivity type and a second epitaxial layer of the second conductivity type on the semiconductor substrate in which the doped layer has been formed, the first epitaxial layer having bandgap energy different from that of the second epitaxial layer.
A method for fabricating an image sensor, the method comprising:
- forming a first epitaxial layer and a second epitaxial layer on a semiconductor substrate in which a photodiode region is defined, the first epitaxial layer having bandgap energy different from that of the second epitaxial layer;
- forming a doped layer of a first conductivity type under the first epitaxial layer;
- and
- implanting a dopant of a second conductivity type into the first epitaxial layer and the second epitaxial layer.
Dependencies are inferred from the claim text.