Semiconductor device and method of producing the same, and power conversion apparatus incorporating this semiconductor device
AssigneeThe Kansai Electric Power Co., Inc.
InventorYoshitaka Sugawara
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Abstract
The temperature of a bipolar semiconductor element using a wide-gap semiconductor is raised using heating means, such as a heater, to obtain a power semiconductor device being large in controllable current and low in loss. The temperature is set at a temperature higher than the temperature at which the decrement of the steady loss of the wide-gap bipolar semiconductor element corresponding to the decrement of the built-in voltage lowering depending on the temperature rising of the wide-gap bipolar semiconductor element is larger than the increment of the steady loss corresponding to the increment of the ON resistance increasing depending on the temperature rising.
Claims2
A semiconductor device production method comprising:
- a step of forming a drift layer of a second conductive type SiC having low impurity concentration on a cathode region of a first conductive type SiC having high impurity concentration,
- a step of forming a base region of a first conductive type SiC on said drift layer,
- a step of forming an anode region of a second conductive type SiC on said base region, and
- a step of irradiating an electron beam having predetermined irradiation energy to said cathode region, drift region, base region and anode region at a predetermined electron density.
A semiconductor device production method comprising:
- a step of forming a drift layer of a first conductive type SiC having low impurity concentration on a cathode region of a first conductive type SiC having high impurity concentration,
- a step of forming an anode region of a second conductive type SiC on said drift layer,
- a step of providing an anode electrode on said anode region,
- a step of providing a cathode electrode on said cathode region, and
- a step of generating stacking faults in said drift layer and anode region by passing a predetermined forward current for a predetermined time across said anode electrode and cathode electrode.
Dependencies are inferred from the claim text.