Semiconductor substrates having useful and transfer layers
AssigneeS.O.I. Tec Silicon on Insulator Technologies, a French company
InventorsBruno Ghyselen, Fabrice Letertre
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Abstract
A semiconductor substrate that includes a relatively thin monocrystalline useful layer, an intermediate layer transferred from a source substrate, and a relatively thick layer of a support present on one of the useful layer of the intermediate layer. The support is made of a deposited material that has a lower quality than that of one or both of the intermediate and useful layers. A bonding layer may be included on one of the intermediate layer or the useful layer, or both, to facilitate bonding of the layers an a thin layer may be provided between the useful layer and intermediate layer. These final substrates are useful in optic, electronic, or optoelectronic applications.
Claims17
A semiconductor substrate comprising a relatively thin monocrystalline useful layer and a relatively thick layer of a support present on the useful layer, wherein the support is made of a deposited material that has a lower quality than that of the useful layer.
Dependencies are inferred from the claim text.