SnSe-based limited reprogrammable cell
AssigneeMicron Technology, Inc.
InventorKristy Campbell
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Abstract
Methods and apparatus for providing a memory device that can be programmed a limited number of times. According to exemplary embodiments, a memory device and its method of formation provide a first electrode, a second electrode and a layer of a chalcogenide or germanium comprising material between the first electrode and the second electrode. The memory device further includes a tin-chalcogenide layer between the chalcogenide or germanium comprising material layer and the second electrode.
Claims69
A memory device comprising:
- a first electrode;
- a second electrode;
- a material layer of a chalcogenide or semi-metal material between the first electrode and the second electrode;
- and
- a tin-chalcogenide layer between the chalcogenide material layer and the second electrode, a ratio of the thickness of the tin-chalcogenide layer to the thickness of the material layer being less than about 4:3.
A memory device, comprising:
- a substrate;
- a conductive address line over the substrate;
- a first electrode over the conductive address line;
- a crystalline chalcogenide material layer over the first electrode;
- a tin-chalcogenide layer over the crystalline chalcogenide material layer;
- and
- a second electrode over the metal-containing layer.
A memory device, comprising:
- a substrate;
- a conductive address line over the substrate;
- a first electrode over the conductive address line;
- a germanium layer over the first electrode;
- a tin-chalcogenide layer over the germanium layer;
- and
- a second electrode over the metal-containing layer.
A processor system, comprising:
- a processor;
- and
- a memory device configured to be programmable a limited number of times, the memory device comprising:
- a first electrode;
- a second electrode;
- a material layer of a chalcogenide or semi-metal material between the first electrode and the second electrode;
- and
- a tin-chalcogenide layer between the chalcogenide material layer and the second electrode, a ratio of the thickness of the tin-chalcogenide layer to the thickness of the material layer being less than about 4:3.
A method of forming a memory device, the method comprising the acts of:
- providing a substrate;
- forming a first electrode over the substrate;
- forming a second electrode over the substrate;
- forming a material layer of a chalcogenide or semi-metal material between the first electrode and the second electrode;
- and
- forming a tin-chalcogenide layer between the chalcogenide material layer and the second electrode, the material layer and the tin-chalcogenide layer formed such that a ratio of the thickness of the tin-chalcogenide layer to the thickness of the material layer is less than about 4:3.
A method of forming a memory element, the method comprising the acts of:
- providing a substrate;
- forming a conductive layer over the substrate;
- forming a first electrode over the substrate;
- forming a first insulating layer over the conductive layer and the substrate;
- forming an opening in the first insulating layer to expose a portion of the conductive layer in the opening;
- forming a material layer in the opening and over the first electrode, the material layer being a chalcogenide material or germanium;
- forming a tin-chalcogenide layer in the opening and over the material layer, the material layer and the tin-chalcogenide layer formed such that a ratio of the thickness of the tin-chalcogenide layer to the thickness of the material layer is less than about 4:3;
- forming a second electrode layer over the tin-chalcogenide layer;
- providing a mask over the second electrode layer;
- etching the material layer, the tin-chalcogenide layer, and the second electrode to form a stack.
A method of forming a memory device, the method comprising the acts of:
- providing a substrate;
- forming a first electrode over the substrate;
- forming a second electrode over the substrate;
- forming a crystalline chalcogenide material layer between the first electrode and the second electrode;
- forming a tin-chalcogenide layer between the chalcogenide material layer and the second electrode;
- and
- forming a silver layer between the tin-chalcogenide layer and the second electrode.
A method of forming a memory device, the method comprising the acts of:
- providing a substrate;
- forming a first electrode over the substrate;
- forming a second electrode over the substrate;
- forming a germanium layer between the first electrode and the second electrode;
- forming a tin-chalcogenide layer between the chalcogenide material layer and the second electrode;
- and
- forming a silver layer between the tin-chalcogenide layer and the second electrode.
Dependencies are inferred from the claim text.