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US 2006/0186339 A1Published application
Thermal-type infrared detection element
AssigneeNEC Corporation
InventorsTokuhito Sasaki, Masahiko Sano
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AssigneeNEC Corporation
InventorsTokuhito Sasaki, Masahiko Sano
Estimating the term…
An infrared absorption film (first through third infrared absorption films) that constitutes a photoreceptor of a thermal-type infrared detection element comprises a laminate film in which a film composed of a novel SiCO material having high absorption on the short-wavelength end (approximately 8 to 10 μm) of the waveband (atmospheric window) from 8 to 14 μm is combined with a film composed of SiO, SiN, SiC, SiON, SiCN, or another material having high absorption on the long-wavelength end (approximately 10 to 14 μm) of the abovementioned waveband. Infrared rays on the short-wavelength end that could not be effectively utilized by the conventional thermal infrared detection element can thereby be absorbed by the SiCO membrane, infrared rays throughout the abovementioned waveband can be effectively utilized, and the sensitivity of the thermal infrared detection element can be enhanced.
An infrared absorption film comprising a plurality of types of films for absorbing infrared rays in a waveband of approximately 8 to 14 μm, wherein said plurality of types of films includes a film composed of SiCO.
A thermal-type infrared detection element comprising:
A thermal-type infrared detection element comprising:
A thermal-type infrared detection element comprising:
Dependencies are inferred from the claim text.